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Hirox 3D Digital Microscope

SEM SH-5500P

Scanning Electron Microscope (SEM) Model SH-5500P by HIROX offers a magnification capacity of up to 150,000x and integrates 5-axis fully motorized control for enhanced automation.

This model features an enlarged specimen holder, accommodating samples with a diameter of up to 80 mm and a thickness of up to 40 mm, enabling the inspection of larger specimens.

The SH-5500P allows voltage adjustments ranging from 1 to 30 kV, adjustable in 6 steps, ensuring versatile operation for various applications.

The specimen stage is highly flexible, offering the following adjustments:

  • X, Y, Z movement (40 mm range)
  • Tilt angle: from -15° to +90°
  • Rotation: 360°
  • Base tilt adjustment: from -45° to +90°

Features: SEM SH-5500P

User-friendly Interface

  • User-friendly interface, allowing direct control of the rotation and tilt axes via a computer interface.

  • It also supports 3D reconstruction of structures by combining multiple inputs, utilizing either 2 SE stereo images or 4 BSE images, delivering detailed 3D visualizations for in-depth analysis.

  • The specimen stage is equipped with a built-in CCD camera, enabling users to view the interior and perform preliminary inspections before conducting precise measurements.

  • Image resolution of up to 5120 x 3560 pixels, ensuring highly detailed visual outputs.
  • Beam resolution: As fine as 5 nm using the SE (Secondary Electron) system.
  • Dual detectors: SE (Secondary Electron) and BSE (Backscattered Electron) for versatile imaging options.
  • Voltage range: Adjustable from 1 to 30 kV, incremented in 6 steps of 5 kV each, for optimal control based on sample requirements.
  • Maximum magnification: Up to 150,000x
  • Automatic adjustment features

Resolution: 5 nm (SE), 8nm (BSE)

Magnification: Max. 150,000x

Voltage: 1kv ~ 30kv (1/5/10/15/20/30)

Detection: SE (Secondary Electron), BSE (Back scattered Electron)

Electron Gun: Tungsten Filament (cartridge)

Sample stage: X, Y : 40mm, R: 360° Z: 0~50mm, T: -15~90° – 5-axis (Fully Motorized)

Sample (Diameter/Height): 80mm/50mm

Vacuum System: High & Low Vacuum

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SEM SH-5500P

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Product code/Model :

SEM SH-5500P